A broad-beam, high-current metal-ion implantation facility
نویسندگان
چکیده
منابع مشابه
Beam Dynamics Studies for a High Current Ion Injector *
Recent ion source developments resulted in the generation of high brilliance, high current beams of protons and light ions. After extraction and transport the beams with large internal space charge forces have to be captured, bunched and preaccelerated for the injection into the following driver part of a new generation of high intensity beam facilities for neutron sources, energy production, t...
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 1991
ISSN: 0168-583X
DOI: 10.1016/0168-583x(91)96221-6